Document Type
Article
Publication Date
2004
Publication Source
Journal of Vacuum Science & Technology A
Abstract
The total ion flux and nitriding rate for stainless steel specimens exposed to a modulated electron beam generated argon-nitrogen plasma were measured as a function of distance from the electron beam axis. The total ion flux decreased linearly with distance, but the nitriding rate increased under certain conditions, contrary to other ion flux/nitriding rate comparisons published in the literature. Variation in ion flux composition with distance was explored with a mass spectrometer and energy analyzer as a possible explanation for the anomalous nitriding rate response to ion flux magnitude. A transition in ion flux composition from mostly N2 1 to predominantly N1 ions with increasing distance was observed. Significant differences in molecular and atomic nitrogen ion energy distributions at a negatively biased electrode were also measured. An explanation for nitriding rate dependence based on flux composition and magnitude is proposed.
Inclusive pages
1530-1535
ISBN/ISSN
0734-2101
Document Version
Published Version
Copyright
Copyright © 2004, American Vacuum Society
Publisher
American Vacuum Society
Volume
22
Peer Reviewed
yes
Issue
4
Sponsoring Agency
Office of Naval Research
eCommons Citation
Muratore, Christopher; Walton, Scott G.; Leonhardt, D.; Fernsler, Richard F.; Blackwell, David D.; and Meger, R. A., "Effect of Plasma Flux Composition on the Nitriding Rate of Stainless Steel" (2004). Chemical and Materials Engineering Faculty Publications. 112.
https://ecommons.udayton.edu/cme_fac_pub/112
Included in
Other Chemical Engineering Commons, Other Materials Science and Engineering Commons, Petroleum Engineering Commons, Polymer and Organic Materials Commons, Thermodynamics Commons
Comments
This document is provided for download in compliance with the publisher's policy on self-archiving. Permission documentation is on file.