Low-Temperature Nitriding of Stainless Steel in an Electron Beam Generated Plasma
Surface and Coatings Technology
An electron beam generated plasma processing system was characterized with in situ diagnostics and employed for a series of low energy (350 eV) stainless steel nitriding experiments in the temperature range of 325–462 °C. Plasma characterization yielded quantitative ion specie fluxes to the stainless steel workpiece in an argon–nitrogen plasma, with a significant fraction of the flux comprised of N+ ions. The nitriding rates were as high as 20 μm h−1/2 with surface layers exhibiting hardness values of approximately 15.5 GPa for specimens processed at all temperatures. X-ray diffraction analysis revealed nitrogen concentrations of approximately 30 at.% in all samples processed below 460 °C. The process activation energy was comparable to that in nitriding systems with higher ion fluxes, suggesting favorable plasma chemistry with respect to plasma nitriding applications.
Copyright © 2005, Elsevier
Muratore, Christopher; Leonhardt, Darrin; Walton, Scott G.; Blackwell, David D.; Fernsler, Richard F.; and Meger, Robert A., "Low-Temperature Nitriding of Stainless Steel in an Electron Beam Generated Plasma" (2005). Chemical and Materials Engineering Faculty Publications. 165.