A Si MMIC compatible ferroelectric varactor shunt switch for microwave applications

Document Type

Article

Publication Date

11-2005

Publication Source

IEEE Microwave Theory and Techniques Society

Abstract

This letter describes a ferroelectric thin-film based varactor shunt switch, for microwave and millimeterwave switching applications. Our implementation is based on a coplanar waveguide transmission line shunted by a ferroelectric varactor. The concept of switching ON and OFF is based on the dielectric tunability of the ferroelectric barium strontium titanium oxide (BST) thin-films. From experimental verification, the isolation of a switch with a varactor area of 75μm2 was approximately 20dB at 35GHz and the insertion loss was below 4.5dB up to 35GHz. This letter addresses the design and experimental verification of the first ferroelectric varactor shunt switch with an Si monolithic microwave integrated circuit compatible process.

Inclusive pages

739 - 741

ISBN/ISSN

1531-1309

Publisher

IEEE

Volume

15

Peer Reviewed

yes

Issue

11

Keywords

MMIC;barium compounds;coplanar transmission lines;coplanar waveguide components;ferroelectric devices;ferroelectric thin films;microwave switches;millimetre wave devices;silicon;strontium compounds;thin film devices;varactors;35 GHz;BST thin-film;BaSrTiO/sub 3/;Si;capacitive shunt switch;coplanar waveguide components;coplanar waveguide transmission line;ferroelectric barium strontium titanium oxide thin film;ferroelectric thin-film;ferroelectric varactor shunt switch;insertion loss;microwave switching;millimeter wave switching;monolithic microwave integrated circuit;Barium;Coplanar transmission lines;Coplanar waveguides;Dielectric thin films;Ferroelectric materials;MMICs;Strontium;Switches;Titanium;Varactors;Capacitive shunt switch;coplanar waveguide (CPW) components;ferroelectric varactor;varactor shunt switch

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