A Si MMIC compatible ferroelectric varactor shunt switch for microwave applications
IEEE Microwave Theory and Techniques Society
This letter describes a ferroelectric thin-film based varactor shunt switch, for microwave and millimeterwave switching applications. Our implementation is based on a coplanar waveguide transmission line shunted by a ferroelectric varactor. The concept of switching ON and OFF is based on the dielectric tunability of the ferroelectric barium strontium titanium oxide (BST) thin-films. From experimental verification, the isolation of a switch with a varactor area of 75μm2 was approximately 20dB at 35GHz and the insertion loss was below 4.5dB up to 35GHz. This letter addresses the design and experimental verification of the first ferroelectric varactor shunt switch with an Si monolithic microwave integrated circuit compatible process.
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MMIC;barium compounds;coplanar transmission lines;coplanar waveguide components;ferroelectric devices;ferroelectric thin films;microwave switches;millimetre wave devices;silicon;strontium compounds;thin film devices;varactors;35 GHz;BST thin-film;BaSrTiO/sub 3/;Si;capacitive shunt switch;coplanar waveguide components;coplanar waveguide transmission line;ferroelectric barium strontium titanium oxide thin film;ferroelectric thin-film;ferroelectric varactor shunt switch;insertion loss;microwave switching;millimeter wave switching;monolithic microwave integrated circuit;Barium;Coplanar transmission lines;Coplanar waveguides;Dielectric thin films;Ferroelectric materials;MMICs;Strontium;Switches;Titanium;Varactors;Capacitive shunt switch;coplanar waveguide (CPW) components;ferroelectric varactor;varactor shunt switch
Subramanyam, Guru; Ahamed, Faruque; and Biggers, Rand, "A Si MMIC compatible ferroelectric varactor shunt switch for microwave applications" (2005). Electrical and Computer Engineering Faculty Publications. 47.