Journal of Vacuum Science & Technology A
The total ion flux and nitriding rate for stainless steel specimens exposed to a modulated electron beam generated argon-nitrogen plasma were measured as a function of distance from the electron beam axis. The total ion flux decreased linearly with distance, but the nitriding rate increased under certain conditions, contrary to other ion flux/nitriding rate comparisons published in the literature. Variation in ion flux composition with distance was explored with a mass spectrometer and energy analyzer as a possible explanation for the anomalous nitriding rate response to ion flux magnitude. A transition in ion flux composition from mostly N2 1 to predominantly N1 ions with increasing distance was observed. Significant differences in molecular and atomic nitrogen ion energy distributions at a negatively biased electrode were also measured. An explanation for nitriding rate dependence based on flux composition and magnitude is proposed.
Copyright © 2004, American Vacuum Society
American Vacuum Society
Office of Naval Research
Muratore, Christopher; Walton, Scott G.; Leonhardt, D.; Fernsler, Richard F.; Blackwell, David D.; and Meger, R. A., "Effect of Plasma Flux Composition on the Nitriding Rate of Stainless Steel" (2004). Chemical and Materials Engineering Faculty Publications. 112.