Part of the Optics Commons

Works by Hak-Gyu Lee in Optics

2016

In-Situ Mass Spectroscopy of ECR Silane Plasmas for Amorphous and Microcrystalline Silicon Growth, Young J. Song, Elena A. Guliants, Hak-Gyu Lee, Wayne A. Anderson
Elena Guliants

2000

In-Situ Mass Spectroscopy of ECR Silane Plasmas for Amorphous and Microcrystalline Silicon Growth, Young J. Song, Elena A. Guliants, Hak-Gyu Lee, Wayne A. Anderson
Electrical and Computer Engineering Faculty Publications

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