Title
Design and development of ferroelectric thin-film based RF MEMS switches for microwave applications
Date of Award
2004
Degree Name
M.S. in Electrical Engineering
Department
Department of Electrical and Computer Engineering
Keywords
Ferroelectric thin films Research Methodology, Microelectromechanical systems Design and construction, Radio frequency, Microwave devices
Rights Statement
Copyright 2004, author
Recommended Citation
Nath, Urmila, "Design and development of ferroelectric thin-film based RF MEMS switches for microwave applications" (2004). Graduate Theses and Dissertations. 4634.
https://ecommons.udayton.edu/graduate_theses/4634
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