Design and development of ferroelectric thin-film based RF MEMS switches for microwave applications
Date of Award
M.S. in Electrical Engineering
Department of Electrical and Computer Engineering
Ferroelectric thin films Research Methodology, Microelectromechanical systems Design and construction, Radio frequency, Microwave devices
Copyright 2004, author
Nath, Urmila, "Design and development of ferroelectric thin-film based RF MEMS switches for microwave applications" (2004). Graduate Theses and Dissertations. 4634.