Title

Design and development of ferroelectric thin-film based RF MEMS switches for microwave applications

Author

Urmila Nath

Date of Award

2004

Degree Name

M.S. in Electrical Engineering

Department

Department of Electrical and Computer Engineering

Keywords

Ferroelectric thin films Research Methodology, Microelectromechanical systems Design and construction, Radio frequency, Microwave devices

Rights Statement

Copyright 2004, author

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