A comparative study of silicon dioxide thin film deposition techniques and the fabrication of ultra-low refractive index nano-porous silicon dioxide thin film

Author

Mengshu Pan, University of Dayton

Date of Award

2008

Degree Name

M.S. in Electro-Optics

Department

Department of Electro-Optics and Photonics

Keywords

Silica, Thin films Optical properties

Rights Statement

Copyright © 2008, author

Recommended Citation

Pan, Mengshu, "A comparative study of silicon dioxide thin film deposition techniques and the fabrication of ultra-low refractive index nano-porous silicon dioxide thin film" (2008). Graduate Theses and Dissertations. 4822.
https://ecommons.udayton.edu/graduate_theses/4822