Title

Development of the imaging capabilities of a Raman microprobe for residual surface stress measurement of silicon and silicon carbide

Date of Award

2002

Degree Name

M.S. in Electro-Optics

Department

Department of Electro-Optics and Photonics

Keywords

Raman spectroscopy Construction and design, Microprobe analysis, Strains and stresses Measurement, Silicon carbide, Silicon

Rights Statement

Copyright 2002, author

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