Title
Sidewall profiles and etching mechanisms in an inductively coupled plasma for silicon, silicon dioxide and lithium niobate
Date of Award
2009
Degree Name
Ph.D. in Electro-Optics
Department
Department of Electro-Optics and Photonics
Keywords
Plasma etching, Silicon Testing, Silica Testing, Lithium niobate Testing
Rights Statement
Copyright 2009, author
Recommended Citation
Sun, Lirong, "Sidewall profiles and etching mechanisms in an inductively coupled plasma for silicon, silicon dioxide and lithium niobate" (2009). Graduate Theses and Dissertations. 5866.
https://ecommons.udayton.edu/graduate_theses/5866
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