Title

Sidewall profiles and etching mechanisms in an inductively coupled plasma for silicon, silicon dioxide and lithium niobate

Author

Lirong Sun

Date of Award

2009

Degree Name

Ph.D. in Electro-Optics

Department

Department of Electro-Optics and Photonics

Keywords

Plasma etching, Silicon Testing, Silica Testing, Lithium niobate Testing

Rights Statement

Copyright 2009, author

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