Title

Low-Temperature Nitriding of Stainless Steel in an Electron Beam Generated Plasma

Author(s)

Christopher Muratore, University of DaytonFollow
Darrin Leonhardt, Naval Research Laboratory
Scott G. Walton, Naval Research Laboratory
David D. Blackwell, Naval Research Laboratory
Richard F. Fernsler, Naval Research Laboratory
Robert A. Meger, Naval Research Laboratory

Document Type

Article

Publication Date

2-2005

Publication Source

Surface and Coatings Technology

Abstract

An electron beam generated plasma processing system was characterized with in situ diagnostics and employed for a series of low energy (350 eV) stainless steel nitriding experiments in the temperature range of 325–462 °C. Plasma characterization yielded quantitative ion specie fluxes to the stainless steel workpiece in an argon–nitrogen plasma, with a significant fraction of the flux comprised of N⁺ ions. The nitriding rates were as high as 20 μm h^−1/2 with surface layers exhibiting hardness values of approximately 15.5 GPa for specimens processed at all temperatures. X-ray diffraction analysis revealed nitrogen concentrations of approximately 30 at.% in all samples processed below 460 °C. The process activation energy was comparable to that in nitriding systems with higher ion fluxes, suggesting favorable plasma chemistry with respect to plasma nitriding applications.

Inclusive pages

255–262

ISBN/ISSN

0257-8972

Comments

Permission documentation is on file.

Copyright

Copyright © 2005, Elsevier

Publisher

Elsevier

Volume

191

Peer Reviewed

yes

Issue

2-3

eCommons Citation

Muratore, Christopher; Leonhardt, Darrin; Walton, Scott G.; Blackwell, David D.; Fernsler, Richard F.; and Meger, Robert A., "Low-Temperature Nitriding of Stainless Steel in an Electron Beam Generated Plasma" (2005). Chemical and Materials Engineering Faculty Publications. 165.
https://ecommons.udayton.edu/cme_fac_pub/165