Optical switching performance of thermally oxidized vanadium dioxide with an integrated thin film heater

Author(s)

Andrew M. Sarangan, University of DaytonFollow
Gamini Ariyawansa, Air Force Research Laboratory
Ilya Vitebskiy, Air Force Research Laboratory
Igor Anisimov, Air Force Research Laboratory

Document Type

Article

Publication Date

7-1-2021

Publication Source

Optical Materials Express

Abstract

Optical switching performance of vanadium dioxide produced by thermal oxidation of vanadium is presented in this paper. A 100nm thick vanadium was oxidized under controlled conditions in a quartz tube furnace to produce approximately 200nm thick VO2. The substrate was appropriately coated on the front and back side to reduce reflection in the cold state, and an integrated thin film heater was fabricated to allow in-situ thermal cycling. Electrical measurements show a greater than three orders of magnitude change in resistivity during the phase transition. Optical measurements exhibit 70% transparency at 1500nm and about 15dB extinction across a wide spectral band between 1000nm and 3000nm. These results are used to show a huge optical bistability effect in VO2-based devices.

Inclusive pages

2348-2358

ISBN/ISSN

2159-3930

Document Version

Published Version

Comments

Document is provided in compliance with the publisher's open-access policy. Permisson documentation is on file.

DOI: https://doi.org/10.1364/OME.430751

Publisher

Optica Publishing Group

Volume

11

Issue

7

eCommons Citation

Sarangan, Andrew M.; Ariyawansa, Gamini; Vitebskiy, Ilya; and Anisimov, Igor, "Optical switching performance of thermally oxidized vanadium dioxide with an integrated thin film heater" (2021). Electro-Optics and Photonics Faculty Publications. 126.
https://ecommons.udayton.edu/eop_fac_pub/126