Title

Design and performance of an infrared spectroscopic ellipsometerreflectometer for thin-film characterization

Date of Award

1996

Degree Name

M.S. in Electro-Optics Engineering

Department

Department of Electro-Optics and Photonics

Keywords

Reflectometer, Ellipsometry, Infrared spectroscopy, Thin films Optical properties

Rights Statement

Copyright 1996, author

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