Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
Date of Award
M.S. in Bioengineering
Department of Chemical, Materials and Bioengineering
Advisor: Christopher Muratore
Development of sensitive and selective electronic molecular sensors is an area of interest for healthcare, industrial safety, law enforcement, national security, and human performance applications. Electronic sensors demonstrate potential benefits of portability, low power consumption, quick response times, and high sensitivity. Two-dimensional transition metal dichalcogenides (2D TMDs) have the potential to revolutionize electronic chemical sensing due to the unique combination of physical, mechanical, and electronic characteristics they possess. However, scaling up 2D TMD materials synthesis for devices remains a major obstacle in realizing their benefits in applications such as molecular sensing. In this work, a novel sensor fabrication technique using photonic annealing of amorphous MoS2 sputtered over large areas >1cm2 is investigated. Sensors for detection of NH3, NO2, methacrolein, and water vapors are demonstrated. Correlations of device sensitivity to the structure and properties of the 2D TMD transducer are presented. The sensor devices fabricated on the centimeter scale with this novel technique demonstrate performance comparable to traditional nanoscale devices, yet, are amenable for commercialization and utilization in application areas of interest.
Biomedical Engineering, Chemical Engineering, Physics, Materials Science, MoS2, Photonic Annealing, Electronic Molecular Recognition, Vapor Sensor, TMDs
Copyright 2020, author
Beyer, Griffin Joseph, "Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2" (2020). Graduate Theses and Dissertations. 6805.