Microwave Assisted Chemical Etching of β-Ga₂O₃

Author

Elizabeth Ann Sowers (0000-0001-9945-7526), University of Dayton

Date of Award

2023

Degree Name

M.S. in Chemistry

Department

Department of Chemistry

Advisor/Chair

Judit Beagle

Abstract

Beta-gallium oxide (BGO) has gained attention in recent years because of its known ultra-wide bandgap, high breakdown electric field, and appropriate mobility, which makes it a promising semiconductor for high-efficiency device applications. In the fabrication process, etching is a critical step in device completion and performance. BGO is widely known to be difficult to etch, due to the strength of its ionic bonds. This difficulty limits the reagents that can etch BGO, which can lead to surface damage and low-aspect ratio architecture. A better etching technique is needed to increase device performance for this semiconductor material. We prove that BGO can be etched without plasma assistance and without the introduction of HF using microwave Department of Chemistry. Samples were characterized via atomic force microscopy (AFM) and energy dispersive X-ray spectrometry (EDS).

Keywords

Department of Chemistry, Materials Science, Gallium oxide, etching, microwave etching, ionic liquid, BGO

Rights Statement

Copyright © 2023, author

Recommended Citation

Sowers, Elizabeth Ann, "Microwave Assisted Chemical Etching of β-Ga₂O₃" (2023). Graduate Theses and Dissertations. 7207.
https://ecommons.udayton.edu/graduate_theses/7207