Integration of motorized kinematic stages in an optical Lithography experiment

Integration of motorized kinematic stages in an optical Lithography experiment

Presenter(s)

Russel Pienias

Comments

Presentation: 10:45 a.m.-12:00 p.m., Kennedy Union Ballroom

Description

Lithography is the technique used to create micro and nanostructures for a variety of applications, in which a laser creates precise patterns in a photosensitive material called a photoresist. In a modern system, both high-resolution piezoelectric stages, as well as large travel stepper motor stages, are needed. LabView is a programming system that allows its users to communicate with instruments that allow the user to control and read different instruments. In this case, LabVIEW is being used to control motion in a 3-dimensional plane, and the ability to have precise motorized movement will do two things for the optical Lithography system: a) it allows the users to align the laser coming into the system which is normally done manually, and b)also it allows users to switch samples in and out of the system with ease as the stages move the samples in and out of the system. In summary, we integrate motion control stages into a lithography system to assist in sample mounting and dismounting while maintaining positional accuracy, and we validate the lithography system using a dose parameter (laser power) characterization.

Publication Date

4-19-2023

Project Designation

Independent Research

Primary Advisor

Imad Agha

Primary Advisor's Department

Physics

Keywords

Stander Symposium, College of Arts and Sciences

Institutional Learning Goals

Scholarship; Practical Wisdom; Vocation

Integration of motorized kinematic stages in an optical Lithography experiment

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